Dr. Mathias Müller

These silicon wafers are patterned on their front side using photolithography. The different colors of the wafers is due to the different coatings on each wafer's surface. This picture was taken in a cleanroom environment.

At the heart of sensors – MEMS technology for LiDAR

In order to meet automotive requirements, LiDARs need to be highly performant and scalable. MEMS-based LiDARs are a suitable solution. But how is the size of the mirrors defined?