MEMS Scanning Module 118

Fully integrated piezoelectrically driven MEMS mirrors for laser scanning systems
MEMS scanning module 118 is a MEMS mirror-based laser scanner boasting an unrivalled large aperture, wide mechanical deflection angles, and a consistent optical performance across the entire field-of-view. The proprietary rugged design is a proven technology, already used in the Blickfeld industrial LiDAR. The module consists of a silicon-based mirror, PCBs, piezoelectric actuators, and a software library and can be used for both single axis or dual axis scanning. It comes with several preprogramed trajectories and allows customized deflection angles to fit your needs.


Maximum mechanical scan range (MSR)


Mirror aperture
11.8 mm
Torsional resonance frequency

270 Hz  ± 10 Hz

Operating temperature
-40 – 85 °C

~ 5 g

All values are preliminary target specifications

Distinctive Features

Schedule a meeting with Blickfeld for a demonstration of the MEMS Scanning Module in action